Publikationen von P. Reinke

Jacob, W.; Reinke, P.; Möller, W.: Ion energy distributions from electron cyclotron resonance methane plasmas. Diamond and Related Materials 2 (2-4), S. 378 - 382 (1993)

Reinke, P.; Jacob, W.; Moeller, W.: The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics 74, 2, S. 1354 - 1361 (1993)

Reinke, P.; Jacob, W.; Möller, W.: Influence of the ion energy on the growth and structure of thin hydrocarbon films. Journal of Applied Physics 74 (2), S. 1354 - 1361 (1993)

Reinke, P.; Schelz, S.; Jacob, W.; Möller, W.: Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films 10 (3), S. 434 - 438 (1992)

Reinke, P.; Jacob, W.; Moeller, W.: Investigation of the Growth Mechanism of C:H Films from ECR Plasma. In: 11th International Symposium on Plasma Chemistry. Symposium Proceedings, S. 823 - 828 (Hg. Harry, J. E.). 11th International Symposium on Plasma Chemistry (ISPC 11), Loughborough, 22. August 1993 - 27. August 1993. (1993)

Reinke, P.; Jacob, W.; Moeller, W.: Ion Energy Distribution at the Substrate in an ECR-Reactor. In: Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute, S. 661 - 667 (Hg. Clausing, R. E.; Angus, J. C.; Koidl, P.). Diamond and Diamond-like Films and Coatings, Castelvecchio Pascoli (IT), 22. Juli 1990 - 03. August 1990. Plenum Press, New York, NY (1991)

Reinke, P.: Ionenenergieverteilungen aus einem ECR-Plasma und ihr Einfluß auf das Schichtwachstum von C:H-Schichten. Max-Planck-Institut für Plasmaphysik, Garching (DE) (1992), 130 S.