Publications of A. von Keudell
All genres
Journal Article (49)
41.
Journal Article
5 (10), pp. 1087 - 1095 (1996)
Secondary electron emission coefficient of C:H and Si:C thin films and some relations to their morphology and composition. Diamond and Related Materials 42.
Journal Article
79 (2), pp. 1092 - 1098 (1996)
Growth and erosion of hydrocarbon films investigated by in situ ellipsometry. Journal of Applied Physics 43.
Journal Article
66 (6), pp. 3545 - 3550 (1995)
A novel setup for spectroscopic ellipsometry using an acousto‐optic tuneable filter. Review of Scientific Instruments 44.
Journal Article
66 (11), pp. 1322 - 1324 (1995)
Role of hydrogen ions in plasma‐enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry. Applied Physics Letters 45.
Journal Article
34 (4B), pp. 2163 - 2171 (1995)
Mechanisms of the Deposition of Hydrogenated Carbon Films. Japanese Journal of Applied Physics Part 1: Regular Papers, Short Notes & Review Papers 46.
Journal Article
75 (12), pp. 7718 - 7727 (1994)
A combined plasma‐surface model for the deposition of C:H films from a methane plasma. Journal of Applied Physics 47.
Journal Article
11 (5), pp. 2508 - 2517 (1993)
Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films 48.
Journal Article
2 (2-4), pp. 251 - 254 (1993)
Deposition of dense C:H films at elevated substrate temperature. Diamond and Related Materials 49.
Journal Article
62 (9), pp. 937 - 939 (1993)
Deposition of dense hydrocarbon films from a nonbiased microwave plasma. Applied Physics Letters Book Chapter (2)
50.
Book Chapter
Surface Loss Probabilities of Hydrocarbon Radicals on Amorphous Hydrogenated Carbon Film Surfaces: Consequences for the Formation of Re-Deposited Layers in Fusion Experiments. In: Proceedings of the NATO Advanced Research Workshop "Hydrogen Recycling at Plasma Facing Materials", St. Petersburg 1999, pp. 331 - 337 (Ed. Wu, C.H.). Kluwer Academic Publishers, Dordrecht (2000)
51.
Book Chapter
The role of ions the deposition of hydrocarbon films, investigated by in situ ellipsometry. In: Film Synthesis and Growth using Energetic Beams, pp. 355 - 366 (Eds. Atwater, H.; Dickinson, J.; Lowndes, D.) (1995)
Conference Paper (7)
52.
Conference Paper
Mechanism of Hydrocarbon Layer Formation in Remote Areas of Fusion Devices. In: 30th EPS Conference on Plasma Physics and Controlled Fusion, O-2.6A (Eds. Koch, R.; Lebedev, S.). 30th European Physical Society Conference on Plasma Physics and Controlled Fusion, St. Petersburg (RU), July 07, 2003 - July 11, 2003. European Physical Society, Geneva (2003)
53.
Conference Paper
Assessment of Ion Surface Scattering (ISS) as in-situ real-time diagnostic tool in low temperature plasmas. In: Workshop Frontiers in Low Temperature Plasma Diagnostics V, pp. 126 - 129 (Eds. DeBenedictis, S.; Dilecce, G.). Frontiers in Low Temperature Plasma Diagnostics V, Specchia (IT), April 03, 2003 - April 07, 2003. Organizing Comittee Workshop FLTPDV-Bari-Italy, Specchia (2003)
54.
Conference Paper
Formation of Polymer-Like Hydrocarbon Films from Radical Beams of Methyl and Atomic Hydrogen. In: Proceedings of the 15th International Symposium on Plasma Chemistry, pp. 239 - 244 (Ed. Bouchoule, A.). 15th International Symposium on Plasma Chemistry, Orleans, 2001. CNRS (2001)
55.
Conference Paper
Fundamental Growth Mechanisms during PECVD of Carbon Thin Films. 13th International Colloquium on Plasma Processes, Antibes, June 10, 2001 - June 14, 2001. CIP'2001 proceedings, pp. 137 - 141 (2001)
56.
Conference Paper
Surface Mechanism during Growth of a-Si:H Films from Low Temperature Plasmas. In: 14th International Symposium on Plasma Chemistry, pp. 1263 - 1265 (Ed. Kopecky, M. H. /. M. K. /. V.). 14th International Symposium on Plasma Chemistry, Prague (CZ), August 02, 1999 - August 06, 1999. (1999)
57.
Conference Paper
Vol. 388, pp. 355 - 366 (1995)
The Role of Ions for the Deposition of Hydrocarbon Films, Investigated by In-Situ Ellipsometry. MRS 1995 Spring Meeting, San Francisco, CA(US). Film Synthesis and Growth Using Energetic Beams 58.
Conference Paper
Simultaneous Plasma and Surface Modeling of the Deposition of Hydrogenated Carbon Films from Methane. In: 11th International Symposium on Plasma Chemistry. Symposium Proceedings, pp. 1662 - 1667 (Ed. Harry, J. E.). 11th International Symposium on Plasma Chemistry (ISPC 11), Loughborough, August 22, 1993 - August 27, 1993. (1993)
Talk (6)
59.
Talk
Growth precursors for amorphous hydrogenated carbon films. 6th Workshop on Frontiers in Low Temperature Plasma Diagnostics, Les Houches (2005)
60.
Talk
Wachstumsspezies bei der plasmagestützten Abscheidung amorpher, wasserstoffhaltiger Kohlenstoffschichten. 12. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen, Mühlleithen (2005)