Publications of A. von Keudell
All genres
Journal Article (49)
21.
Journal Article
89, pp. 2979 - 2986 (2001)
Simultaneous Interaction of Methyl Radicals and Atomic Hydrogen with Amorphous Hydrogenated Carbon Films. Journal of Applied Physics 22.
Journal Article
290-293, pp. 231 - 237 (2001)
Surface reactions of hydrocarbon radicals: suppression of the re-deposition in fusion experiments via a divertor liner. Journal of Nuclear Materials 23.
Journal Article
87, pp. 2719 - 2725 (2000)
Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces. Journal of Applied Physics 24.
Journal Article
30 (3), pp. 508 - 516 (2000)
Infrared Analysis of Thin Films: Amorphous, Hydrogenated Carbon on Silicon. Brazilian Journal of Physics 25.
Journal Article
18, pp. 995 - 1001 (2000)
Novel method for absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen. Journal of Vacuum Science and Technology A 26.
Journal Article
76, pp. 676 - 678 (2000)
Direct Identification of the Synergism between Methyl Radicals and Atomic Hydrogen during Growth of Amorphous Hydrogenated Carbon Films. Applied Physics Letters 27.
Journal Article
74 (25), pp. 3800 - 3802 (1999)
Surface loss probabilities of the dominant neutral precursors for film growth in methane and acetylene discharges. Applied Physics Letters 28.
Journal Article
38 (7A), pp. 4002 - 4006 (1999)
Thermally induced changes in the hydrogen microstructure of amorphous hydrogenated silicon films, analyzed using in situ real time infrared spectroscopy. Japanese Journal of Applied Physics. Part 1 29.
Journal Article
59 (8), pp. 5791 - 5798 (1999)
Direct insertion of SiH3 radicals into strained Si-Si surface bonds during plasma deposition of hydrogenated amorphous silicon films. Physical Review B 30.
Journal Article
264 (1-2), pp. 48 - 55 (1999)
Erosion of thin hydrogenated carbon films in oxygen, oxygen/hydrogen and water plasmas. Journal of Nuclear Materials 31.
Journal Article
86 (7), pp. 3988 - 3996 (1999)
Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties. Journal of Applied Physics 32.
Journal Article
39 (10), pp. 1451 - 1462 (1999)
Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers in fusion experiments. Nuclear Fusion 33.
Journal Article
312, pp. 147 - 155 (1998)
Structure of Plasma-Deposited Amorphous Hydrogenated Boron-Carbon Thin Films. Thin Solid Films 34.
Journal Article
84 (1), pp. 489 - 495 (1998)
The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets. Journal of Applied Physics 35.
Journal Article
125 (1-4), pp. 323 - 327 (1997)
Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 36.
Journal Article
15 (2), pp. 402 - 407 (1997)
Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate. Journal of Vacuum Science and Technology A 37.
Journal Article
81 (3), pp. 1531 - 1535 (1997)
Surface relaxation during plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry. Journal of Applied Physics 38.
Journal Article
307, pp. 65 - 70 (1997)
Multivariate analysis of noise-corrupted PECVD data. Thin Solid Films 39.
Journal Article
231 (1-2), pp. 151 - 154 (1996)
Erosion of amorphous hydrogenated boron-carbon thin films. Journal of Nuclear Materials 40.
Journal Article
231, s. 1-2, pp. 151 - 154 (1996)
Erosion of Amorphous Hydrogenated Boron-Carbon Thin Films. Journal of Nuclear Materials